High-speed 4-port sorter
Speed up the 4-port sorter and improve throughput! Compatible with 6 and 8-inch wafers.
This product is a device that accelerates a 4-port sorter and improves throughput. All cassette stages have lifting functions, and sorting is performed by two robots for retrieval and storage. Additionally, it is capable of splitting from one cassette to three cassettes and integrating from three cassettes to one cassette. It can be linked with factory systems to select transfer patterns for each lot. 【Features】 ■ Compatible with 6 and 8-inch wafers ■ All cassette stages have lifting functions ■ Sorting is performed by two robots for retrieval and storage ■ Capable of splitting from one cassette to three cassettes and integrating from three cassettes to one cassette ■ Can be linked with factory systems to select transfer patterns for each lot *For more details, please refer to the PDF document or feel free to contact us.
- 企業：アテル
- 価格：Other
